Rotarex · Specialty gas systems

Diaphragm low pressure line valve for HP & UHP gases - M12

Manufacturer product images · for reference

Diaphragm low pressure line valve for HP & UHP gases - M12 — manufacturer product image

M12 is a diaphragm valve for HP & UHP applications. Its springless design keeps the highest level of purity of the gas. The M12 is intended for low pressure up to 15 bar. Two actuation are available for purchase : multi-turn handwheel or pneumatic actuator.

Key features
  • 100% Helium Leak Test performed
  • Available in sizes 1/2" to 3/4" to support a wide range of connections
  • Assembling, testing & Packaging in cleanroom: Class ISO 4
  • Individual serial number for full traceability
  • Electropolished surface roughness per SEMI F19 UHP Grade
  • Excellent purgeability due to optional purge ports
  • Fluid specific seat material as standard options
  • Replaceable seat
  • UHP Material - Semi F20 option available

Specialty gas systems

Technical specifications
BrandRotarex
CategorySpecialty gas systems
Wetted volume< 7 cm 3
Burst pressure> 700 bar
Temperature rangeSee table above
Flow capacity (cv)1.75
Max. working pressureSee table above
Nominal seat diameter12 Mm
Pneumatic actuator opening pressure5 to 7 bar
Certified max. helium outboard leak rate≤ 1 x 10 -9 mbar.l/s
Certified max. helium inboard leak rate (at max. pressure)≤ 1 x 10 -9 mbar.l/s
Certified max. helium across the seat leak rate (at max. pressure)≤ 1 x 10 -9 mbar.l/s

Product information and images are compiled from the manufacturer's own publications; they do not depict a Sedan Mühendislik installation. Technical data is confirmed before ordering.

More images
Diaphragm low pressure line valve for HP & UHP gases - M12 — 1
Diaphragm low pressure line valve for HP & UHP gases - M12 — 2
Diaphragm low pressure line valve for HP & UHP gases - M12 — 3
Diaphragm low pressure line valve for HP & UHP gases - M12 — 4
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