Rotarex · Specialty gas systems

Single-stage diaphragm pressure regulator for HP & UHP gases - RX4000

Manufacturer product images · for reference

Single-stage diaphragm pressure regulator for HP & UHP gases - RX4000 — manufacturer product image

RX4000 is single stage free diaphragm pressure regulator for high purity & ultra high purity applications. The first of its kind threadless pressure regulators for the highest level of purity.

Key features
  • Unique threadless design in all versions for a higher purity level
  • Optimized supply pressure effect and excellent flow stability
  • Life duration according to CGA E4
  • Vacuum to 240 bar (3500 psi) inlet
  • Assembling, testing & packaging in cleanroom: Class ISO 4
  • Individual serial number for full traceability
  • Electropolished surface per SEMI F19 UHP Grade
  • UHP Material - Semi F20 option available

Specialty gas systems

Technical specifications
BrandRotarex
CategorySpecialty gas systems
Poppet typeFree diaphragm
Burst pressure300% of operating pressure
Proof pressure150% of operating pressure
Temperature range-20°C to +65°C (-4°F to +149°F)
Certified max. helium outboard leak rate≤ 1 x 10 -9 mbar.l/s
Certified max. helium inboard leak rate (at max. pressure)≤ 1 x 10 -9 mbar.l/s
Certified max. helium across the seat leak rate (at max. pressure)≤ 1 x 10 -8 mbar.l/s

Product information and images are compiled from the manufacturer's own publications; they do not depict a Sedan Mühendislik installation. Technical data is confirmed before ordering.

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Single-stage diaphragm pressure regulator for HP & UHP gases - RX4000 — 1
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