
Rotarex · UHP — ultra high purity
High Performance Vacuum Generator Block Type System - RXVGB
Manufacturer product images · for reference

A vacuum generator is an essential safety device designed for gas line purging before opening cylinders or disconnecting gas lines. Used in semiconductor industry, it efficiently evacuates residual process gases, preventing exposure to harmful or reactive substances. By creating a vacuum, it minimizes the risk of leaks, explosions, or pressure buildup during maintenance and cylinder changeovers, ensuring a safer working environment. RXVGB (Block Type) provides 60torr Vacuum Generated with minimum source (60slpm at 80psig N2).
- High Performance with compact design
- 316L Stainless Steel Construction
- 60torr Vacuum Generated with minimum source (60slpm at 80psig N2)
- 100% performance test (Vacuum & He inboard test)
- DI water cleaned, 100% welded, assembled tested & packed in clean room
| Brand | Rotarex |
|---|---|
| Category | UHP — ultra high purity |
| Finish | Ra 20μin (0.5μm) |
| N2 inlet | 78 to 110psig / 5.3 to 7.6 bar |
| Leak rate | ≤1x10 -9 mbar.l/s |
| Burst pressure | 300% of operating pressures |
| Proof pressure | 150% of operating pressures |
| Vacuum maximum | 27in.Hg (60torr) |
| Operating temperature | -40°F to +160°F / -40°C to +71°C |
| Vacuum port (operating) | 3,500psig / 241bar |
Product information and images are compiled from the manufacturer's own publications; they do not depict a Sedan Mühendislik installation. Technical data is confirmed before ordering.

UHP — ultra high purity


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