Rotarex
UHP — ultra high purity
Ultra-high-purity valves and regulators for semiconductor manufacturing, in bellows and diaphragm seal types, with stainless steel canisters and vacuum equipment.
Tied diaphragm seal type 10Packed seal type 9Diaphragm seal type 7Stainless steel canisters 3O-ring seal type 2Vacuum generators 2High purity gas line valves 2Valves with integrated pressure regulator (VIPR) 2
Tied diaphragm seal type10 products
High pressure, dual port UHP cylinder valve - D340S
Product detail — High pressure, dual port UHP cylinder valve - D340S
High pressure & high flow UHP cylinder valve – D339S
Product detail — High pressure & high flow UHP cylinder valve – D339S
High Pressure, oleo-pneumatic, UHP cylinder valve - D354
Product detail — High Pressure, oleo-pneumatic, UHP cylinder valve - D354
High pressure UHP cylinder valve for highly oxidizing gases – D306
Product detail — High pressure UHP cylinder valve for highly oxidizing gases – D306
High pressure UHP cylinder valve with Oleo-pneumatic actuator - D389S
Product detail — High pressure UHP cylinder valve with Oleo-pneumatic actuator - D389S
Low pressure & high flow dual port UHP cylinder valve - D342
Product detail — Low pressure & high flow dual port UHP cylinder valve - D342
Low pressure & high flow UHP cylinder valve - D337
Product detail — Low pressure & high flow UHP cylinder valve - D337
Low pressure & high flow UHP cylinder valve with pneumatic actuator - D387
Product detail — Low pressure & high flow UHP cylinder valve with pneumatic actuator - D387
Oleo-pneumatic UHP cylinder valve for highly oxidizing gases – D356
Product detail — Oleo-pneumatic UHP cylinder valve for highly oxidizing gases – D356Packed seal type9 products
2-pieces sturdy stem design high pressure cylinder valves for corrosive gases – D160S
Product detail — 2-pieces sturdy stem design high pressure cylinder valves for corrosive gases – D160S
Drum valve, 2-pieces sturdy stem packed type design for corrosive and toxic gases – D154S
Product detail — Drum valve, 2-pieces sturdy stem packed type design for corrosive and toxic gases – D154S
Drum valve, 2-pieces sturdy stem packed type design for corrosive and toxic gases – D158
Product detail — Drum valve, 2-pieces sturdy stem packed type design for corrosive and toxic gases – D158
High pressure cylinder and bundle valve with pneumatic actuator for corrosive gases - D131
Product detail — High pressure cylinder and bundle valve with pneumatic actuator for corrosive gases - D131
High pressure cylinder valves, packed needle stem design, for high purity gases - D100
Product detail — High pressure cylinder valves, packed needle stem design, for high purity gases - D100
High pressure cylinder valves with pneumatic actuator for corrosive gases – D156S
Product detail — High pressure cylinder valves with pneumatic actuator for corrosive gases – D156S
High pressure cylinder valve with spring loaded v-gaskets and RPV – D167S
Product detail — High pressure cylinder valve with spring loaded v-gaskets and RPV – D167S
High pressure, packed type cylinder valve for corrosive and toxic gases with non-return valve – D183
Product detail — High pressure, packed type cylinder valve for corrosive and toxic gases with non-return valve – D183
Spring loaded dual port cylinder valve for corrosive gases – D195S
Product detail — Spring loaded dual port cylinder valve for corrosive gases – D195SDiaphragm seal type7 products
Brass cylinder inline RPV valve for High Purity gases - D283
Product detail — Brass cylinder inline RPV valve for High Purity gases - D283
Diaphragm seal lecture bottle valve - D250
Product detail — Diaphragm seal lecture bottle valve - D250
Direct seal brass cylinder valve for high purity gases - D203
Product detail — Direct seal brass cylinder valve for high purity gases - D203
High pressure cylinder valve for High purity gases – D200
Product detail — High pressure cylinder valve for High purity gases – D200
High pressure dual port cylinder valve for High Purity gases - D265
Product detail — High pressure dual port cylinder valve for High Purity gases - D265
Low pressure dual port brass cylinder valves - D285
Product detail — Low pressure dual port brass cylinder valves - D285
Stainless steel cylinder offline RPV valve for High Purity gases - D282
Product detail — Stainless steel cylinder offline RPV valve for High Purity gases - D282Stainless steel canisters3 products
Large stainless-steel canister for high-purity, metalorganic precursors and dopants - RX200B
Product detail — Large stainless-steel canister for high-purity, metalorganic precursors and dopants - RX200B
Medium stainless-steel canister for high-purity, metalorganic precursors and dopants - RX171L
Product detail — Medium stainless-steel canister for high-purity, metalorganic precursors and dopants - RX171L
Small stainless-steel Canister for high-purity, metalorganic precursors and dopants - RX507L
Product detail — Small stainless-steel Canister for high-purity, metalorganic precursors and dopants - RX507LO-ring seal type2 products
Constant Flow Cylinder Valve - D405
Product detail — Constant Flow Cylinder Valve - D405
High pressure cylinder valve specific applications - D488
Product detail — High pressure cylinder valve specific applications - D488Vacuum generators2 products
High Performance Vacuum Generator Block Type System - RXVGB
Product detail — High Performance Vacuum Generator Block Type System - RXVGB
High Performance Vacuum Generator Module Type System - RXVGM
Product detail — High Performance Vacuum Generator Module Type System - RXVGMHigh purity gas line valves2 products
High pressure bundle valve for hydrogen, helium and other gases – D615
Product detail — High pressure bundle valve for hydrogen, helium and other gases – D615 
Pneumatic high-pressure bundle valve for hydrogen, helium and other gases - D655
Product detail — Pneumatic high-pressure bundle valve for hydrogen, helium and other gases - D655Valves with integrated pressure regulator (VIPR)2 products
Integrated valve with adjustable pressure regulator - DUCAL D551
Product detail — Integrated valve with adjustable pressure regulator - DUCAL D551
Integrated valve with flow selector - D552 Flowcal
Product detail — Integrated valve with flow selector - D552 FlowcalManufacturer product images · for reference · Product information and images are compiled from the manufacturer's own publications; they do not depict a Sedan Mühendislik installation. Technical data is confirmed before ordering.
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