A vacuum generator is an essential safety device designed to protect gas supply lines and improve system efficiency. Equipped with an integrated non-return valve and an air-operated orifice, it prevents contamination while guaranteeing optimal performance. Used in semiconductor applications, it allows the remote evacuation of hazardous gases, safely removing them from the work environment. By continuously eliminating moisture, it prevents corrosive gas buildup and ensures system durability. Its built-in check valve blocks reverse flow, maintaining a clean nitrogen supply. RXVGM (Module Type) features an integrated check valve and offers multiple bleed options, all in a compact, easy-to-install design.
Key features
High Performance with compact design
316L Stainless Steel Construction
100torr Vacuum Generated with minimum source (60slpm at 80psig N2)
DI water cleaned, 100% welded, assembled tested & packed in clean room
100% performance test (Vacuum, Reseal, cracking Pressure)
Normally Closed air actuator type
Various bleed option available (2.5 / 5 / 8 / 15 slpm at 80psig N2)
Product information and images are compiled from the manufacturer's own publications; they do not depict a Sedan Mühendislik installation. Technical data is confirmed before ordering.
More images
From the same category
UHP — ultra high purity
2-pieces sturdy stem design high pressure cylinder valves for corrosive gases – D160S
Tell us the protected volume and we will size the system together
The dimensions of the space, the equipment inside it and whether people are present — those three are enough. We come back with an agent recommendation, the system scope and the price.
We'll prepare your written quote.Call or e-mail us.
